JPS5138215B2 - - Google Patents

Info

Publication number
JPS5138215B2
JPS5138215B2 JP47092762A JP9276272A JPS5138215B2 JP S5138215 B2 JPS5138215 B2 JP S5138215B2 JP 47092762 A JP47092762 A JP 47092762A JP 9276272 A JP9276272 A JP 9276272A JP S5138215 B2 JPS5138215 B2 JP S5138215B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47092762A
Other languages
Japanese (ja)
Other versions
JPS4838972A (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712146071 external-priority patent/DE2146071C3/de
Application filed filed Critical
Publication of JPS4838972A publication Critical patent/JPS4838972A/ja
Publication of JPS5138215B2 publication Critical patent/JPS5138215B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/025—Compensating stray fields
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F7/00—Regulating magnetic variables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00—Screening of apparatus or components against electric or magnetic fields
    • H05K9/0064—Earth or grounding circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Electron Sources, Ion Sources (AREA)
JP47092762A 1971-09-15 1972-09-14 Expired JPS5138215B2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712146071 DE2146071C3 (de) 1971-09-15 Anordnung zum Erzielen eines von magnetischen Störfeldern freien Raumes

Publications (2)

Publication Number Publication Date
JPS4838972A JPS4838972A (enrdf_load_html_response) 1973-06-08
JPS5138215B2 true JPS5138215B2 (enrdf_load_html_response) 1976-10-20

Family

ID=5819613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47092762A Expired JPS5138215B2 (enrdf_load_html_response) 1971-09-15 1972-09-14

Country Status (2)

Country Link
JP (1) JPS5138215B2 (enrdf_load_html_response)
NL (1) NL7206464A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0482815U (enrdf_load_html_response) * 1990-11-28 1992-07-20

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112469U (enrdf_load_html_response) * 1977-02-15 1978-09-07
JPS5729158A (en) * 1980-07-30 1982-02-17 Hitachi Ltd Retrying system for program
JP2650574B2 (ja) * 1992-07-10 1997-09-03 株式会社島津製作所 磁場型質量分析装置
JP3406273B2 (ja) * 2000-03-28 2003-05-12 株式会社エムティアイ 外乱磁界キャンセル装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0482815U (enrdf_load_html_response) * 1990-11-28 1992-07-20

Also Published As

Publication number Publication date
NL7206464A (enrdf_load_html_response) 1973-03-19
DE2146071B2 (de) 1975-07-10
DE2146071A1 (de) 1973-03-22
JPS4838972A (enrdf_load_html_response) 1973-06-08

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