JPS5137837B2 - - Google Patents
Info
- Publication number
- JPS5137837B2 JPS5137837B2 JP47113026A JP11302672A JPS5137837B2 JP S5137837 B2 JPS5137837 B2 JP S5137837B2 JP 47113026 A JP47113026 A JP 47113026A JP 11302672 A JP11302672 A JP 11302672A JP S5137837 B2 JPS5137837 B2 JP S5137837B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47113026A JPS5137837B2 (lm) | 1972-11-13 | 1972-11-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47113026A JPS5137837B2 (lm) | 1972-11-13 | 1972-11-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4972184A JPS4972184A (lm) | 1974-07-12 |
JPS5137837B2 true JPS5137837B2 (lm) | 1976-10-18 |
Family
ID=14601570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47113026A Expired JPS5137837B2 (lm) | 1972-11-13 | 1972-11-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5137837B2 (lm) |
-
1972
- 1972-11-13 JP JP47113026A patent/JPS5137837B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4972184A (lm) | 1974-07-12 |