JPS5137148B2 - - Google Patents
Info
- Publication number
- JPS5137148B2 JPS5137148B2 JP7244571A JP7244571A JPS5137148B2 JP S5137148 B2 JPS5137148 B2 JP S5137148B2 JP 7244571 A JP7244571 A JP 7244571A JP 7244571 A JP7244571 A JP 7244571A JP S5137148 B2 JPS5137148 B2 JP S5137148B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7244571A JPS5137148B2 (https=) | 1971-09-20 | 1971-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7244571A JPS5137148B2 (https=) | 1971-09-20 | 1971-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4838981A JPS4838981A (https=) | 1973-06-08 |
| JPS5137148B2 true JPS5137148B2 (https=) | 1976-10-14 |
Family
ID=13489482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7244571A Expired JPS5137148B2 (https=) | 1971-09-20 | 1971-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5137148B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62201450U (https=) * | 1986-06-12 | 1987-12-22 |
-
1971
- 1971-09-20 JP JP7244571A patent/JPS5137148B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4838981A (https=) | 1973-06-08 |