JPS5137148B2 - - Google Patents

Info

Publication number
JPS5137148B2
JPS5137148B2 JP7244571A JP7244571A JPS5137148B2 JP S5137148 B2 JPS5137148 B2 JP S5137148B2 JP 7244571 A JP7244571 A JP 7244571A JP 7244571 A JP7244571 A JP 7244571A JP S5137148 B2 JPS5137148 B2 JP S5137148B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7244571A
Other languages
Japanese (ja)
Other versions
JPS4838981A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7244571A priority Critical patent/JPS5137148B2/ja
Publication of JPS4838981A publication Critical patent/JPS4838981A/ja
Publication of JPS5137148B2 publication Critical patent/JPS5137148B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7244571A 1971-09-20 1971-09-20 Expired JPS5137148B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7244571A JPS5137148B2 (enrdf_load_stackoverflow) 1971-09-20 1971-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7244571A JPS5137148B2 (enrdf_load_stackoverflow) 1971-09-20 1971-09-20

Publications (2)

Publication Number Publication Date
JPS4838981A JPS4838981A (enrdf_load_stackoverflow) 1973-06-08
JPS5137148B2 true JPS5137148B2 (enrdf_load_stackoverflow) 1976-10-14

Family

ID=13489482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7244571A Expired JPS5137148B2 (enrdf_load_stackoverflow) 1971-09-20 1971-09-20

Country Status (1)

Country Link
JP (1) JPS5137148B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201450U (enrdf_load_stackoverflow) * 1986-06-12 1987-12-22

Also Published As

Publication number Publication date
JPS4838981A (enrdf_load_stackoverflow) 1973-06-08

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