JPS5137144B2 - - Google Patents

Info

Publication number
JPS5137144B2
JPS5137144B2 JP46100523A JP10052371A JPS5137144B2 JP S5137144 B2 JPS5137144 B2 JP S5137144B2 JP 46100523 A JP46100523 A JP 46100523A JP 10052371 A JP10052371 A JP 10052371A JP S5137144 B2 JPS5137144 B2 JP S5137144B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46100523A
Other languages
Japanese (ja)
Other versions
JPS4865873A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46100523A priority Critical patent/JPS5137144B2/ja
Priority to NL7213557A priority patent/NL7213557A/xx
Priority to US295554A priority patent/US3896765A/en
Priority to CA153,457A priority patent/CA967080A/en
Priority to DE2249144A priority patent/DE2249144C3/de
Publication of JPS4865873A publication Critical patent/JPS4865873A/ja
Publication of JPS5137144B2 publication Critical patent/JPS5137144B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP46100523A 1971-10-06 1971-12-10 Expired JPS5137144B2 (en:Method)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP46100523A JPS5137144B2 (en:Method) 1971-12-10 1971-12-10
NL7213557A NL7213557A (en:Method) 1971-10-06 1972-10-06
US295554A US3896765A (en) 1971-10-06 1972-10-06 Apparatus for liquid-phase epitaxial growth
CA153,457A CA967080A (en) 1971-10-06 1972-10-06 Method and apparatus for liquid-phase epitaxial growth
DE2249144A DE2249144C3 (de) 1971-10-06 1972-10-06 11.09.72 Japan 47-91536 Vorrichtung zum epitaktischen Aufwachsen einer Halbleiterschicht auf ein Substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46100523A JPS5137144B2 (en:Method) 1971-12-10 1971-12-10

Publications (2)

Publication Number Publication Date
JPS4865873A JPS4865873A (en:Method) 1973-09-10
JPS5137144B2 true JPS5137144B2 (en:Method) 1976-10-14

Family

ID=14276302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46100523A Expired JPS5137144B2 (en:Method) 1971-10-06 1971-12-10

Country Status (1)

Country Link
JP (1) JPS5137144B2 (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610763B2 (en:Method) * 1973-05-07 1981-03-10

Also Published As

Publication number Publication date
JPS4865873A (en:Method) 1973-09-10

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