JPS5136375A - - Google Patents
Info
- Publication number
- JPS5136375A JPS5136375A JP49109233A JP10923374A JPS5136375A JP S5136375 A JPS5136375 A JP S5136375A JP 49109233 A JP49109233 A JP 49109233A JP 10923374 A JP10923374 A JP 10923374A JP S5136375 A JPS5136375 A JP S5136375A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10923374A JPS5429147B2 (en) | 1974-09-20 | 1974-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10923374A JPS5429147B2 (en) | 1974-09-20 | 1974-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5136375A true JPS5136375A (en) | 1976-03-27 |
| JPS5429147B2 JPS5429147B2 (en) | 1979-09-21 |
Family
ID=14504978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10923374A Expired JPS5429147B2 (en) | 1974-09-20 | 1974-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5429147B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492493A (en) * | 1977-11-30 | 1979-07-21 | Semi Bulk Systems Inc | Enclosed device for filling and taking out powder* and container therefor |
| JPS5618383U (en) * | 1979-07-20 | 1981-02-18 | ||
| US8382555B2 (en) | 2008-11-26 | 2013-02-26 | Semes Co., Ltd. | Substrate supporting unit, and apparatus and method for polishing substrate using the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS3730807Y1 (en) * | 1960-12-28 | 1962-11-19 | ||
| JPS423749Y1 (en) * | 1966-07-06 | 1967-03-03 |
-
1974
- 1974-09-20 JP JP10923374A patent/JPS5429147B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS3730807Y1 (en) * | 1960-12-28 | 1962-11-19 | ||
| JPS423749Y1 (en) * | 1966-07-06 | 1967-03-03 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492493A (en) * | 1977-11-30 | 1979-07-21 | Semi Bulk Systems Inc | Enclosed device for filling and taking out powder* and container therefor |
| JPS5951701U (en) * | 1977-11-30 | 1984-04-05 | セミバルク・システムズ・インコ−ポレイテツド | Closed flowable material handling equipment |
| JPS5618383U (en) * | 1979-07-20 | 1981-02-18 | ||
| US8382555B2 (en) | 2008-11-26 | 2013-02-26 | Semes Co., Ltd. | Substrate supporting unit, and apparatus and method for polishing substrate using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5429147B2 (en) | 1979-09-21 |