JPS5136285Y2 - - Google Patents

Info

Publication number
JPS5136285Y2
JPS5136285Y2 JP1971059414U JP5941471U JPS5136285Y2 JP S5136285 Y2 JPS5136285 Y2 JP S5136285Y2 JP 1971059414 U JP1971059414 U JP 1971059414U JP 5941471 U JP5941471 U JP 5941471U JP S5136285 Y2 JPS5136285 Y2 JP S5136285Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1971059414U
Other languages
Japanese (ja)
Other versions
JPS4816441U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1971059414U priority Critical patent/JPS5136285Y2/ja
Publication of JPS4816441U publication Critical patent/JPS4816441U/ja
Application granted granted Critical
Publication of JPS5136285Y2 publication Critical patent/JPS5136285Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP1971059414U 1971-07-06 1971-07-06 Expired JPS5136285Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1971059414U JPS5136285Y2 (en) 1971-07-06 1971-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1971059414U JPS5136285Y2 (en) 1971-07-06 1971-07-06

Publications (2)

Publication Number Publication Date
JPS4816441U JPS4816441U (en) 1973-02-24
JPS5136285Y2 true JPS5136285Y2 (en) 1976-09-06

Family

ID=27947146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1971059414U Expired JPS5136285Y2 (en) 1971-07-06 1971-07-06

Country Status (1)

Country Link
JP (1) JPS5136285Y2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5131331B1 (en) * 1970-06-16 1976-09-06
JPS5174668U (en) * 1974-12-09 1976-06-11
JPS5191656U (en) * 1975-01-20 1976-07-22
JPS51148566U (en) * 1975-04-16 1976-11-29
JPS5435255Y2 (en) * 1975-04-25 1979-10-26
JPS5512585Y2 (en) * 1975-04-25 1980-03-19
JPS52109924U (en) * 1976-02-17 1977-08-20
KR101574336B1 (en) * 2013-10-21 2015-12-07 에이피시스템 주식회사 supporter and substrate processing apparatus having the same and treatment method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311312U (en) * 1989-06-17 1991-02-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311312U (en) * 1989-06-17 1991-02-04

Also Published As

Publication number Publication date
JPS4816441U (en) 1973-02-24

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