JPS5136152B2 - - Google Patents

Info

Publication number
JPS5136152B2
JPS5136152B2 JP47022110A JP2211072A JPS5136152B2 JP S5136152 B2 JPS5136152 B2 JP S5136152B2 JP 47022110 A JP47022110 A JP 47022110A JP 2211072 A JP2211072 A JP 2211072A JP S5136152 B2 JPS5136152 B2 JP S5136152B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47022110A
Other languages
Japanese (ja)
Other versions
JPS4890670A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47022110A priority Critical patent/JPS5136152B2/ja
Publication of JPS4890670A publication Critical patent/JPS4890670A/ja
Publication of JPS5136152B2 publication Critical patent/JPS5136152B2/ja
Expired legal-status Critical Current

Links

JP47022110A 1972-03-03 1972-03-03 Expired JPS5136152B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47022110A JPS5136152B2 (enExample) 1972-03-03 1972-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47022110A JPS5136152B2 (enExample) 1972-03-03 1972-03-03

Publications (2)

Publication Number Publication Date
JPS4890670A JPS4890670A (enExample) 1973-11-26
JPS5136152B2 true JPS5136152B2 (enExample) 1976-10-06

Family

ID=12073731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47022110A Expired JPS5136152B2 (enExample) 1972-03-03 1972-03-03

Country Status (1)

Country Link
JP (1) JPS5136152B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51138064U (enExample) * 1975-04-28 1976-11-08
JPS5327359A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Electronic microscope prov ided with electron beam deflector

Also Published As

Publication number Publication date
JPS4890670A (enExample) 1973-11-26

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