JPS5136152B2 - - Google Patents
Info
- Publication number
- JPS5136152B2 JPS5136152B2 JP47022110A JP2211072A JPS5136152B2 JP S5136152 B2 JPS5136152 B2 JP S5136152B2 JP 47022110 A JP47022110 A JP 47022110A JP 2211072 A JP2211072 A JP 2211072A JP S5136152 B2 JPS5136152 B2 JP S5136152B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47022110A JPS5136152B2 (en:Method) | 1972-03-03 | 1972-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47022110A JPS5136152B2 (en:Method) | 1972-03-03 | 1972-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4890670A JPS4890670A (en:Method) | 1973-11-26 |
| JPS5136152B2 true JPS5136152B2 (en:Method) | 1976-10-06 |
Family
ID=12073731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47022110A Expired JPS5136152B2 (en:Method) | 1972-03-03 | 1972-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5136152B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51138064U (en:Method) * | 1975-04-28 | 1976-11-08 | ||
| JPS5327359A (en) * | 1976-08-27 | 1978-03-14 | Hitachi Ltd | Electronic microscope prov ided with electron beam deflector |
-
1972
- 1972-03-03 JP JP47022110A patent/JPS5136152B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4890670A (en:Method) | 1973-11-26 |