JPS5136152B2 - - Google Patents

Info

Publication number
JPS5136152B2
JPS5136152B2 JP47022110A JP2211072A JPS5136152B2 JP S5136152 B2 JPS5136152 B2 JP S5136152B2 JP 47022110 A JP47022110 A JP 47022110A JP 2211072 A JP2211072 A JP 2211072A JP S5136152 B2 JPS5136152 B2 JP S5136152B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47022110A
Other languages
Japanese (ja)
Other versions
JPS4890670A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47022110A priority Critical patent/JPS5136152B2/ja
Publication of JPS4890670A publication Critical patent/JPS4890670A/ja
Publication of JPS5136152B2 publication Critical patent/JPS5136152B2/ja
Expired legal-status Critical Current

Links

JP47022110A 1972-03-03 1972-03-03 Expired JPS5136152B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47022110A JPS5136152B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-03 1972-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47022110A JPS5136152B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-03 1972-03-03

Publications (2)

Publication Number Publication Date
JPS4890670A JPS4890670A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-26
JPS5136152B2 true JPS5136152B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-06

Family

ID=12073731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47022110A Expired JPS5136152B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-03 1972-03-03

Country Status (1)

Country Link
JP (1) JPS5136152B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51138064U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-04-28 1976-11-08
JPS5327359A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Electronic microscope prov ided with electron beam deflector

Also Published As

Publication number Publication date
JPS4890670A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-26

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