JPS5135346A - - Google Patents
Info
- Publication number
- JPS5135346A JPS5135346A JP49107807A JP10780774A JPS5135346A JP S5135346 A JPS5135346 A JP S5135346A JP 49107807 A JP49107807 A JP 49107807A JP 10780774 A JP10780774 A JP 10780774A JP S5135346 A JPS5135346 A JP S5135346A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
- Y02E10/44—Heat exchange systems
Landscapes
- Optical Elements Other Than Lenses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49107807A JPS5135346A (de) | 1974-09-20 | 1974-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49107807A JPS5135346A (de) | 1974-09-20 | 1974-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5135346A true JPS5135346A (de) | 1976-03-25 |
Family
ID=14468521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49107807A Pending JPS5135346A (de) | 1974-09-20 | 1974-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5135346A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311643U (de) * | 1976-07-13 | 1978-01-31 | ||
| JPS61116746A (ja) * | 1984-09-19 | 1986-06-04 | アプライド マテリアルズ インコ−ポレ−テツド | 半導体ウエハをイオンインプランテ−シヨンする装置及び方法 |
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1974
- 1974-09-20 JP JP49107807A patent/JPS5135346A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311643U (de) * | 1976-07-13 | 1978-01-31 | ||
| JPS562123Y2 (de) * | 1976-07-13 | 1981-01-19 | ||
| JPS61116746A (ja) * | 1984-09-19 | 1986-06-04 | アプライド マテリアルズ インコ−ポレ−テツド | 半導体ウエハをイオンインプランテ−シヨンする装置及び方法 |