JPS5135126U - - Google Patents
Info
- Publication number
- JPS5135126U JPS5135126U JP10872274U JP10872274U JPS5135126U JP S5135126 U JPS5135126 U JP S5135126U JP 10872274 U JP10872274 U JP 10872274U JP 10872274 U JP10872274 U JP 10872274U JP S5135126 U JPS5135126 U JP S5135126U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974108722U JPS551114Y2 (https=) | 1974-09-09 | 1974-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974108722U JPS551114Y2 (https=) | 1974-09-09 | 1974-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5135126U true JPS5135126U (https=) | 1976-03-16 |
| JPS551114Y2 JPS551114Y2 (https=) | 1980-01-12 |
Family
ID=28328883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974108722U Expired JPS551114Y2 (https=) | 1974-09-09 | 1974-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS551114Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6039059A (en) | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4927241U (https=) * | 1972-06-06 | 1974-03-08 |
-
1974
- 1974-09-09 JP JP1974108722U patent/JPS551114Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4927241U (https=) * | 1972-06-06 | 1974-03-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS551114Y2 (https=) | 1980-01-12 |