JPS5135065B2 - - Google Patents
Info
- Publication number
- JPS5135065B2 JPS5135065B2 JP10574673A JP10574673A JPS5135065B2 JP S5135065 B2 JPS5135065 B2 JP S5135065B2 JP 10574673 A JP10574673 A JP 10574673A JP 10574673 A JP10574673 A JP 10574673A JP S5135065 B2 JPS5135065 B2 JP S5135065B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10574673A JPS5135065B2 (https=) | 1973-09-18 | 1973-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10574673A JPS5135065B2 (https=) | 1973-09-18 | 1973-09-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5056065A JPS5056065A (https=) | 1975-05-16 |
| JPS5135065B2 true JPS5135065B2 (https=) | 1976-09-30 |
Family
ID=14415810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10574673A Expired JPS5135065B2 (https=) | 1973-09-18 | 1973-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5135065B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5732644U (https=) * | 1980-08-04 | 1982-02-20 | ||
| JPS5732643U (https=) * | 1980-08-04 | 1982-02-20 |
-
1973
- 1973-09-18 JP JP10574673A patent/JPS5135065B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5732644U (https=) * | 1980-08-04 | 1982-02-20 | ||
| JPS5732643U (https=) * | 1980-08-04 | 1982-02-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5056065A (https=) | 1975-05-16 |