JPS5134818B2 - - Google Patents
Info
- Publication number
- JPS5134818B2 JPS5134818B2 JP2104572A JP2104572A JPS5134818B2 JP S5134818 B2 JPS5134818 B2 JP S5134818B2 JP 2104572 A JP2104572 A JP 2104572A JP 2104572 A JP2104572 A JP 2104572A JP S5134818 B2 JPS5134818 B2 JP S5134818B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2104572A JPS5134818B2 (en) | 1972-03-02 | 1972-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2104572A JPS5134818B2 (en) | 1972-03-02 | 1972-03-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4889845A JPS4889845A (en) | 1973-11-24 |
| JPS5134818B2 true JPS5134818B2 (en) | 1976-09-29 |
Family
ID=12043947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2104572A Expired JPS5134818B2 (en) | 1972-03-02 | 1972-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5134818B2 (en) |
-
1972
- 1972-03-02 JP JP2104572A patent/JPS5134818B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4889845A (en) | 1973-11-24 |