JPS5134672A - Fuotoetsuchinguhoho - Google Patents

Fuotoetsuchinguhoho

Info

Publication number
JPS5134672A
JPS5134672A JP49108221A JP10822174A JPS5134672A JP S5134672 A JPS5134672 A JP S5134672A JP 49108221 A JP49108221 A JP 49108221A JP 10822174 A JP10822174 A JP 10822174A JP S5134672 A JPS5134672 A JP S5134672A
Authority
JP
Japan
Prior art keywords
fuotoetsuchinguhoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49108221A
Other languages
English (en)
Japanese (ja)
Inventor
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP49108221A priority Critical patent/JPS5134672A/ja
Publication of JPS5134672A publication Critical patent/JPS5134672A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
JP49108221A 1974-09-18 1974-09-18 Fuotoetsuchinguhoho Pending JPS5134672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49108221A JPS5134672A (en) 1974-09-18 1974-09-18 Fuotoetsuchinguhoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49108221A JPS5134672A (en) 1974-09-18 1974-09-18 Fuotoetsuchinguhoho

Publications (1)

Publication Number Publication Date
JPS5134672A true JPS5134672A (en) 1976-03-24

Family

ID=14479097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49108221A Pending JPS5134672A (en) 1974-09-18 1974-09-18 Fuotoetsuchinguhoho

Country Status (1)

Country Link
JP (1) JPS5134672A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6287800U (OSRAM) * 1985-11-19 1987-06-04
JPS6295800U (OSRAM) * 1985-12-02 1987-06-18

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834039A (OSRAM) * 1971-09-03 1973-05-15
JPS48102774A (OSRAM) * 1972-04-10 1973-12-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834039A (OSRAM) * 1971-09-03 1973-05-15
JPS48102774A (OSRAM) * 1972-04-10 1973-12-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6287800U (OSRAM) * 1985-11-19 1987-06-04
JPS6295800U (OSRAM) * 1985-12-02 1987-06-18

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