JPS5134386A - - Google Patents

Info

Publication number
JPS5134386A
JPS5134386A JP49108036A JP10803674A JPS5134386A JP S5134386 A JPS5134386 A JP S5134386A JP 49108036 A JP49108036 A JP 49108036A JP 10803674 A JP10803674 A JP 10803674A JP S5134386 A JPS5134386 A JP S5134386A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49108036A
Other languages
Japanese (ja)
Inventor
Kenji Shiga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON DENKI SHIRUBANIA KK
NIPPON DENKI SYLVANIA KK
Original Assignee
NIPPON DENKI SHIRUBANIA KK
NIPPON DENKI SYLVANIA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON DENKI SHIRUBANIA KK, NIPPON DENKI SYLVANIA KK filed Critical NIPPON DENKI SHIRUBANIA KK
Priority to JP49108036A priority Critical patent/JPS5134386A/ja
Publication of JPS5134386A publication Critical patent/JPS5134386A/ja
Pending legal-status Critical Current

Links

JP49108036A 1974-09-18 1974-09-18 Pending JPS5134386A (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49108036A JPS5134386A (xx) 1974-09-18 1974-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49108036A JPS5134386A (xx) 1974-09-18 1974-09-18

Publications (1)

Publication Number Publication Date
JPS5134386A true JPS5134386A (xx) 1976-03-24

Family

ID=14474312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49108036A Pending JPS5134386A (xx) 1974-09-18 1974-09-18

Country Status (1)

Country Link
JP (1) JPS5134386A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220342294A1 (en) * 2019-09-25 2022-10-27 Hoya Corporation Mask blank, phase shift mask, and method of manufacturing semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893177A (xx) * 1972-03-09 1973-12-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893177A (xx) * 1972-03-09 1973-12-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220342294A1 (en) * 2019-09-25 2022-10-27 Hoya Corporation Mask blank, phase shift mask, and method of manufacturing semiconductor device

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