JPS5134029U - - Google Patents
Info
- Publication number
- JPS5134029U JPS5134029U JP10682674U JP10682674U JPS5134029U JP S5134029 U JPS5134029 U JP S5134029U JP 10682674 U JP10682674 U JP 10682674U JP 10682674 U JP10682674 U JP 10682674U JP S5134029 U JPS5134029 U JP S5134029U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10682674U JPS5134029U (en) | 1974-09-05 | 1974-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10682674U JPS5134029U (en) | 1974-09-05 | 1974-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5134029U true JPS5134029U (en) | 1976-03-12 |
Family
ID=28323526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10682674U Pending JPS5134029U (en) | 1974-09-05 | 1974-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5134029U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5358319U (en) * | 1976-10-20 | 1978-05-18 | ||
| JPS562952U (en) * | 1979-06-21 | 1981-01-12 | ||
| JPS61175376A (en) * | 1985-01-23 | 1986-08-07 | フイツシヤー・コントロールズ・インターナシヨナル・インコーポレーテツド | Roll diaphragm regulating valve |
| JP2000320696A (en) * | 1999-05-06 | 2000-11-24 | Ckd Corp | Flow regulating valve |
| WO2014188785A1 (en) * | 2013-05-24 | 2014-11-27 | 日立金属株式会社 | Flow rate control valve and mass flow controller using same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1283726A (en) * | 1968-10-23 | 1972-08-02 | Gaz De France | Silent expander for gaseous fluids |
-
1974
- 1974-09-05 JP JP10682674U patent/JPS5134029U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1283726A (en) * | 1968-10-23 | 1972-08-02 | Gaz De France | Silent expander for gaseous fluids |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5358319U (en) * | 1976-10-20 | 1978-05-18 | ||
| JPS5727024Y2 (en) * | 1976-10-20 | 1982-06-11 | ||
| JPS562952U (en) * | 1979-06-21 | 1981-01-12 | ||
| JPS61175376A (en) * | 1985-01-23 | 1986-08-07 | フイツシヤー・コントロールズ・インターナシヨナル・インコーポレーテツド | Roll diaphragm regulating valve |
| JP2000320696A (en) * | 1999-05-06 | 2000-11-24 | Ckd Corp | Flow regulating valve |
| WO2014188785A1 (en) * | 2013-05-24 | 2014-11-27 | 日立金属株式会社 | Flow rate control valve and mass flow controller using same |
| JP2014229159A (en) * | 2013-05-24 | 2014-12-08 | 日立金属株式会社 | Flow control valve and mass flow controller using the same |
| CN104969136A (en) * | 2013-05-24 | 2015-10-07 | 日立金属株式会社 | Flow rate control valve and mass flow controller using same |