JPS5132501B2 - - Google Patents
Info
- Publication number
- JPS5132501B2 JPS5132501B2 JP4348272A JP4348272A JPS5132501B2 JP S5132501 B2 JPS5132501 B2 JP S5132501B2 JP 4348272 A JP4348272 A JP 4348272A JP 4348272 A JP4348272 A JP 4348272A JP S5132501 B2 JPS5132501 B2 JP S5132501B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4348272A JPS5132501B2 (https=) | 1972-05-01 | 1972-05-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4348272A JPS5132501B2 (https=) | 1972-05-01 | 1972-05-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS495266A JPS495266A (https=) | 1974-01-17 |
| JPS5132501B2 true JPS5132501B2 (https=) | 1976-09-13 |
Family
ID=12664930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4348272A Expired JPS5132501B2 (https=) | 1972-05-01 | 1972-05-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5132501B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0049032B1 (en) * | 1980-08-21 | 1986-09-17 | National Research Development Corporation | Coating insulating materials by glow discharge |
| JPH01307443A (ja) * | 1988-06-03 | 1989-12-12 | Tokyo Electron Ltd | プラズマ処理装置 |
-
1972
- 1972-05-01 JP JP4348272A patent/JPS5132501B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS495266A (https=) | 1974-01-17 |