JPS5132490A - Supatsutasochi - Google Patents
SupatsutasochiInfo
- Publication number
- JPS5132490A JPS5132490A JP10492674A JP10492674A JPS5132490A JP S5132490 A JPS5132490 A JP S5132490A JP 10492674 A JP10492674 A JP 10492674A JP 10492674 A JP10492674 A JP 10492674A JP S5132490 A JPS5132490 A JP S5132490A
- Authority
- JP
- Japan
- Prior art keywords
- supatsuta
- sochi
- supatsuta sochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10492674A JPS5132490A (ja) | 1974-09-13 | 1974-09-13 | Supatsutasochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10492674A JPS5132490A (ja) | 1974-09-13 | 1974-09-13 | Supatsutasochi |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5132490A true JPS5132490A (ja) | 1976-03-19 |
JPS5340191B2 JPS5340191B2 (ja) | 1978-10-25 |
Family
ID=14393693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10492674A Granted JPS5132490A (ja) | 1974-09-13 | 1974-09-13 | Supatsutasochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5132490A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5332851U (ja) * | 1976-08-26 | 1978-03-22 | ||
US4431473A (en) * | 1981-07-17 | 1984-02-14 | Tokyo Shibaura Denki Kabushiki Kaisha | RIE Apparatus utilizing a shielded magnetron to enhance etching |
JPH01301853A (ja) * | 1988-05-31 | 1989-12-06 | Hitachi Ltd | 真空処理装置 |
-
1974
- 1974-09-13 JP JP10492674A patent/JPS5132490A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5332851U (ja) * | 1976-08-26 | 1978-03-22 | ||
JPS5546760Y2 (ja) * | 1976-08-26 | 1980-11-01 | ||
US4431473A (en) * | 1981-07-17 | 1984-02-14 | Tokyo Shibaura Denki Kabushiki Kaisha | RIE Apparatus utilizing a shielded magnetron to enhance etching |
JPH01301853A (ja) * | 1988-05-31 | 1989-12-06 | Hitachi Ltd | 真空処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5340191B2 (ja) | 1978-10-25 |
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