JPS5132490A - Supatsutasochi - Google Patents

Supatsutasochi

Info

Publication number
JPS5132490A
JPS5132490A JP10492674A JP10492674A JPS5132490A JP S5132490 A JPS5132490 A JP S5132490A JP 10492674 A JP10492674 A JP 10492674A JP 10492674 A JP10492674 A JP 10492674A JP S5132490 A JPS5132490 A JP S5132490A
Authority
JP
Japan
Prior art keywords
supatsuta
sochi
supatsuta sochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10492674A
Other languages
English (en)
Other versions
JPS5340191B2 (ja
Inventor
Tetsuo Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimada Rika Kogyo KK
Original Assignee
Shimada Rika Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimada Rika Kogyo KK filed Critical Shimada Rika Kogyo KK
Priority to JP10492674A priority Critical patent/JPS5132490A/ja
Publication of JPS5132490A publication Critical patent/JPS5132490A/ja
Publication of JPS5340191B2 publication Critical patent/JPS5340191B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10492674A 1974-09-13 1974-09-13 Supatsutasochi Granted JPS5132490A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10492674A JPS5132490A (ja) 1974-09-13 1974-09-13 Supatsutasochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10492674A JPS5132490A (ja) 1974-09-13 1974-09-13 Supatsutasochi

Publications (2)

Publication Number Publication Date
JPS5132490A true JPS5132490A (ja) 1976-03-19
JPS5340191B2 JPS5340191B2 (ja) 1978-10-25

Family

ID=14393693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10492674A Granted JPS5132490A (ja) 1974-09-13 1974-09-13 Supatsutasochi

Country Status (1)

Country Link
JP (1) JPS5132490A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5332851U (ja) * 1976-08-26 1978-03-22
US4431473A (en) * 1981-07-17 1984-02-14 Tokyo Shibaura Denki Kabushiki Kaisha RIE Apparatus utilizing a shielded magnetron to enhance etching
JPH01301853A (ja) * 1988-05-31 1989-12-06 Hitachi Ltd 真空処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5332851U (ja) * 1976-08-26 1978-03-22
JPS5546760Y2 (ja) * 1976-08-26 1980-11-01
US4431473A (en) * 1981-07-17 1984-02-14 Tokyo Shibaura Denki Kabushiki Kaisha RIE Apparatus utilizing a shielded magnetron to enhance etching
JPH01301853A (ja) * 1988-05-31 1989-12-06 Hitachi Ltd 真空処理装置

Also Published As

Publication number Publication date
JPS5340191B2 (ja) 1978-10-25

Similar Documents

Publication Publication Date Title
JPS518517A (ja) Chokuryuanteikasochi
JPS51109399A (ja) Sokosuruchojakuseniseihinonetsushorisuruhohoto sochi
JPS5110478A (ja) Shitsushikishujinkiniokeru shujinekino funmuhoho narabini sochi
JPS5156188A (ja) Handotaireezasochi
JPS5111033A (ja) Renzokutasoseikyokaisengasushiirudoyosetsuhooyobisono sochi
JPS5110614A (ja) Shichuniudekanokeishisuru sochi
JPS5116980A (ja) Kanshitsusochi
JPS5155141A (ja) Sukuryukonbeashikishunsetsu sochi niokeru shunsetsuhetsudo
JPS5111155A (ja) Anteikadengensochi
JPS511130A (ja) Kakikomishokyogaokonaeru fukushasochi
JPS518499A (ja) Denshisenshoshasochi
JPS5110430A (ja) Nenshoseigyosochi
JPS5121405A (ja) Botandenwasochi
JPS5132490A (ja) Supatsutasochi
JPS5110053A (ja) Shuyakusaibaisochi
JPS5128979A (ja) Butsupinisosochi
JPS5110555A (ja) Ojokozaitsuriagesochi
JPS5112479A (ja) Suchiseigyokosakukikaino gosahoseihohooyobisono sochi
JPS5110256A (ja) Mekanikarurotsukusochi
JPS5113497A (ja) Hodenkakosochi
JPS5110950A (ja) Hikarihenkosochi
JPS5110178A (ja) Kiekisetsushokuhannosochi
JPS5110390A (ja) Tsushinkeeburuyososenno katsudoyoriawasehohooyobisono sochi
JPS5159520A (ja) Puratenidoseigyosochi
JPS5110091A (ja) Suibotsuamiichikakuninhohooyobi sochi