JPS5132353U - - Google Patents
Info
- Publication number
- JPS5132353U JPS5132353U JP10485874U JP10485874U JPS5132353U JP S5132353 U JPS5132353 U JP S5132353U JP 10485874 U JP10485874 U JP 10485874U JP 10485874 U JP10485874 U JP 10485874U JP S5132353 U JPS5132353 U JP S5132353U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10485874U JPS5132353U (cs) | 1974-08-30 | 1974-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10485874U JPS5132353U (cs) | 1974-08-30 | 1974-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5132353U true JPS5132353U (cs) | 1976-03-09 |
Family
ID=28317982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10485874U Pending JPS5132353U (cs) | 1974-08-30 | 1974-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5132353U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160653U (cs) * | 1988-04-27 | 1989-11-08 | ||
| JPH0357152A (ja) * | 1989-07-26 | 1991-03-12 | Nec Yamagata Ltd | イオン注入装置 |
-
1974
- 1974-08-30 JP JP10485874U patent/JPS5132353U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160653U (cs) * | 1988-04-27 | 1989-11-08 | ||
| JPH0357152A (ja) * | 1989-07-26 | 1991-03-12 | Nec Yamagata Ltd | イオン注入装置 |