JPS513173A - Hakumakupataanseizosochi - Google Patents

Hakumakupataanseizosochi

Info

Publication number
JPS513173A
JPS513173A JP7305674A JP7305674A JPS513173A JP S513173 A JPS513173 A JP S513173A JP 7305674 A JP7305674 A JP 7305674A JP 7305674 A JP7305674 A JP 7305674A JP S513173 A JPS513173 A JP S513173A
Authority
JP
Japan
Prior art keywords
pataanseizosochi
hakumaku
hakumaku pataanseizosochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7305674A
Other languages
English (en)
Inventor
Kenzo Kichi
Osamu Yamazaki
Kyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7305674A priority Critical patent/JPS513173A/ja
Publication of JPS513173A publication Critical patent/JPS513173A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7305674A 1974-06-25 1974-06-25 Hakumakupataanseizosochi Pending JPS513173A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7305674A JPS513173A (ja) 1974-06-25 1974-06-25 Hakumakupataanseizosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7305674A JPS513173A (ja) 1974-06-25 1974-06-25 Hakumakupataanseizosochi

Publications (1)

Publication Number Publication Date
JPS513173A true JPS513173A (ja) 1976-01-12

Family

ID=13507307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7305674A Pending JPS513173A (ja) 1974-06-25 1974-06-25 Hakumakupataanseizosochi

Country Status (1)

Country Link
JP (1) JPS513173A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870530A (ja) * 1981-10-22 1983-04-27 Toshiba Corp レジストパタ−ン形成方法
JPS59145525A (ja) * 1983-02-09 1984-08-21 Matsushita Electronics Corp レジスト現像方法
JPS59208724A (ja) * 1983-05-06 1984-11-27 アメリカン・テレフオン・アンド・テレグラフ・カムパニ− デバイス製作方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870530A (ja) * 1981-10-22 1983-04-27 Toshiba Corp レジストパタ−ン形成方法
JPS59145525A (ja) * 1983-02-09 1984-08-21 Matsushita Electronics Corp レジスト現像方法
JPH0144011B2 (ja) * 1983-02-09 1989-09-25 Matsushita Electronics Corp
JPS59208724A (ja) * 1983-05-06 1984-11-27 アメリカン・テレフオン・アンド・テレグラフ・カムパニ− デバイス製作方法

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