JPS5131459B2 - - Google Patents
Info
- Publication number
- JPS5131459B2 JPS5131459B2 JP3233973A JP3233973A JPS5131459B2 JP S5131459 B2 JPS5131459 B2 JP S5131459B2 JP 3233973 A JP3233973 A JP 3233973A JP 3233973 A JP3233973 A JP 3233973A JP S5131459 B2 JPS5131459 B2 JP S5131459B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3233973A JPS5131459B2 (cs) | 1973-03-20 | 1973-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3233973A JPS5131459B2 (cs) | 1973-03-20 | 1973-03-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49120467A JPS49120467A (cs) | 1974-11-18 |
| JPS5131459B2 true JPS5131459B2 (cs) | 1976-09-07 |
Family
ID=12356179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3233973A Expired JPS5131459B2 (cs) | 1973-03-20 | 1973-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5131459B2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6110791Y2 (cs) * | 1978-10-16 | 1986-04-05 |
-
1973
- 1973-03-20 JP JP3233973A patent/JPS5131459B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49120467A (cs) | 1974-11-18 |