JPS5131189B1 - - Google Patents

Info

Publication number
JPS5131189B1
JPS5131189B1 JP47084897A JP8489772A JPS5131189B1 JP S5131189 B1 JPS5131189 B1 JP S5131189B1 JP 47084897 A JP47084897 A JP 47084897A JP 8489772 A JP8489772 A JP 8489772A JP S5131189 B1 JPS5131189 B1 JP S5131189B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47084897A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47084897A priority Critical patent/JPS5131189B1/ja
Publication of JPS5131189B1 publication Critical patent/JPS5131189B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • Holders For Sensitive Materials And Originals (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP47084897A 1972-08-24 1972-08-24 Pending JPS5131189B1 (US20080293856A1-20081127-C00127.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47084897A JPS5131189B1 (US20080293856A1-20081127-C00127.png) 1972-08-24 1972-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47084897A JPS5131189B1 (US20080293856A1-20081127-C00127.png) 1972-08-24 1972-08-24

Publications (1)

Publication Number Publication Date
JPS5131189B1 true JPS5131189B1 (US20080293856A1-20081127-C00127.png) 1976-09-04

Family

ID=13843518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47084897A Pending JPS5131189B1 (US20080293856A1-20081127-C00127.png) 1972-08-24 1972-08-24

Country Status (1)

Country Link
JP (1) JPS5131189B1 (US20080293856A1-20081127-C00127.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394372U (US20080293856A1-20081127-C00127.png) * 1976-12-29 1978-08-01

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2720146A (en) * 1951-07-27 1955-10-11 Buckbee Mears Co Photo-printing apparatus
US2814975A (en) * 1954-08-16 1957-12-03 Norman B Mears Photo-printing apparatus
US3192844A (en) * 1963-03-05 1965-07-06 Kulicke And Soffa Mfg Company Mask alignment fixture
US3280715A (en) * 1964-06-11 1966-10-25 United Aircraft Corp Micropattern aligning device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2720146A (en) * 1951-07-27 1955-10-11 Buckbee Mears Co Photo-printing apparatus
US2814975A (en) * 1954-08-16 1957-12-03 Norman B Mears Photo-printing apparatus
US3192844A (en) * 1963-03-05 1965-07-06 Kulicke And Soffa Mfg Company Mask alignment fixture
US3280715A (en) * 1964-06-11 1966-10-25 United Aircraft Corp Micropattern aligning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394372U (US20080293856A1-20081127-C00127.png) * 1976-12-29 1978-08-01

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