JPS5130915U - - Google Patents
Info
- Publication number
- JPS5130915U JPS5130915U JP10286674U JP10286674U JPS5130915U JP S5130915 U JPS5130915 U JP S5130915U JP 10286674 U JP10286674 U JP 10286674U JP 10286674 U JP10286674 U JP 10286674U JP S5130915 U JPS5130915 U JP S5130915U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exhaust Gas After Treatment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10286674U JPS54887Y2 (ja) | 1974-08-28 | 1974-08-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10286674U JPS54887Y2 (ja) | 1974-08-28 | 1974-08-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5130915U true JPS5130915U (ja) | 1976-03-05 |
JPS54887Y2 JPS54887Y2 (ja) | 1979-01-17 |
Family
ID=28312383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10286674U Expired JPS54887Y2 (ja) | 1974-08-28 | 1974-08-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54887Y2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60101949A (ja) * | 1983-11-08 | 1985-06-06 | Matsushita Electric Ind Co Ltd | 半導体結晶板へき開装置 |
-
1974
- 1974-08-28 JP JP10286674U patent/JPS54887Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60101949A (ja) * | 1983-11-08 | 1985-06-06 | Matsushita Electric Ind Co Ltd | 半導体結晶板へき開装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS54887Y2 (ja) | 1979-01-17 |