JPS5130762B1 - - Google Patents

Info

Publication number
JPS5130762B1
JPS5130762B1 JP3307771A JP3307771A JPS5130762B1 JP S5130762 B1 JPS5130762 B1 JP S5130762B1 JP 3307771 A JP3307771 A JP 3307771A JP 3307771 A JP3307771 A JP 3307771A JP S5130762 B1 JPS5130762 B1 JP S5130762B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3307771A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3307771A priority Critical patent/JPS5130762B1/ja
Publication of JPS5130762B1 publication Critical patent/JPS5130762B1/ja
Pending legal-status Critical Current

Links

JP3307771A 1971-05-17 1971-05-17 Pending JPS5130762B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3307771A JPS5130762B1 (en) 1971-05-17 1971-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3307771A JPS5130762B1 (en) 1971-05-17 1971-05-17

Publications (1)

Publication Number Publication Date
JPS5130762B1 true JPS5130762B1 (en) 1976-09-02

Family

ID=12376637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3307771A Pending JPS5130762B1 (en) 1971-05-17 1971-05-17

Country Status (1)

Country Link
JP (1) JPS5130762B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor

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