JPS5130481B2 - - Google Patents

Info

Publication number
JPS5130481B2
JPS5130481B2 JP552073A JP552073A JPS5130481B2 JP S5130481 B2 JPS5130481 B2 JP S5130481B2 JP 552073 A JP552073 A JP 552073A JP 552073 A JP552073 A JP 552073A JP S5130481 B2 JPS5130481 B2 JP S5130481B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP552073A
Other languages
Japanese (ja)
Other versions
JPS4994401A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP552073A priority Critical patent/JPS5130481B2/ja
Publication of JPS4994401A publication Critical patent/JPS4994401A/ja
Publication of JPS5130481B2 publication Critical patent/JPS5130481B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP552073A 1973-01-11 1973-01-11 Expired JPS5130481B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP552073A JPS5130481B2 (enExample) 1973-01-11 1973-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP552073A JPS5130481B2 (enExample) 1973-01-11 1973-01-11

Publications (2)

Publication Number Publication Date
JPS4994401A JPS4994401A (enExample) 1974-09-07
JPS5130481B2 true JPS5130481B2 (enExample) 1976-09-01

Family

ID=11613452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP552073A Expired JPS5130481B2 (enExample) 1973-01-11 1973-01-11

Country Status (1)

Country Link
JP (1) JPS5130481B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52157781U (enExample) * 1976-05-24 1977-11-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52157781U (enExample) * 1976-05-24 1977-11-30

Also Published As

Publication number Publication date
JPS4994401A (enExample) 1974-09-07

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