JPS5127246Y2 - - Google Patents

Info

Publication number
JPS5127246Y2
JPS5127246Y2 JP9574372U JP9574372U JPS5127246Y2 JP S5127246 Y2 JPS5127246 Y2 JP S5127246Y2 JP 9574372 U JP9574372 U JP 9574372U JP 9574372 U JP9574372 U JP 9574372U JP S5127246 Y2 JPS5127246 Y2 JP S5127246Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9574372U
Other languages
Japanese (ja)
Other versions
JPS4951867U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9574372U priority Critical patent/JPS5127246Y2/ja
Publication of JPS4951867U publication Critical patent/JPS4951867U/ja
Application granted granted Critical
Publication of JPS5127246Y2 publication Critical patent/JPS5127246Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9574372U 1972-08-17 1972-08-17 Expired JPS5127246Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9574372U JPS5127246Y2 (en) 1972-08-17 1972-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9574372U JPS5127246Y2 (en) 1972-08-17 1972-08-17

Publications (2)

Publication Number Publication Date
JPS4951867U JPS4951867U (en) 1974-05-08
JPS5127246Y2 true JPS5127246Y2 (en) 1976-07-10

Family

ID=28292332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9574372U Expired JPS5127246Y2 (en) 1972-08-17 1972-08-17

Country Status (1)

Country Link
JP (1) JPS5127246Y2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (en) * 1974-08-05 1976-02-12 Toray Industries RENZOKU SUPATSUTARINGUHOHO
JPS5252133A (en) * 1975-07-11 1977-04-26 Tokuda Seisakusho Continuous film coating apparatus

Also Published As

Publication number Publication date
JPS4951867U (en) 1974-05-08

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