JPS5127226B2 - - Google Patents

Info

Publication number
JPS5127226B2
JPS5127226B2 JP47037809A JP3780972A JPS5127226B2 JP S5127226 B2 JPS5127226 B2 JP S5127226B2 JP 47037809 A JP47037809 A JP 47037809A JP 3780972 A JP3780972 A JP 3780972A JP S5127226 B2 JPS5127226 B2 JP S5127226B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47037809A
Other languages
Japanese (ja)
Other versions
JPS48103471A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47037809A priority Critical patent/JPS5127226B2/ja
Publication of JPS48103471A publication Critical patent/JPS48103471A/ja
Publication of JPS5127226B2 publication Critical patent/JPS5127226B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47037809A 1972-04-17 1972-04-17 Expired JPS5127226B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47037809A JPS5127226B2 (en) 1972-04-17 1972-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47037809A JPS5127226B2 (en) 1972-04-17 1972-04-17

Publications (2)

Publication Number Publication Date
JPS48103471A JPS48103471A (en) 1973-12-25
JPS5127226B2 true JPS5127226B2 (en) 1976-08-11

Family

ID=12507825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47037809A Expired JPS5127226B2 (en) 1972-04-17 1972-04-17

Country Status (1)

Country Link
JP (1) JPS5127226B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455085U (en) * 1987-10-02 1989-04-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455085U (en) * 1987-10-02 1989-04-05

Also Published As

Publication number Publication date
JPS48103471A (en) 1973-12-25

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