JPS5125967A - - Google Patents

Info

Publication number
JPS5125967A
JPS5125967A JP49098654A JP9865474A JPS5125967A JP S5125967 A JPS5125967 A JP S5125967A JP 49098654 A JP49098654 A JP 49098654A JP 9865474 A JP9865474 A JP 9865474A JP S5125967 A JPS5125967 A JP S5125967A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49098654A
Other languages
Japanese (ja)
Inventor
Yoshifumi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP49098654A priority Critical patent/JPS5125967A/ja
Publication of JPS5125967A publication Critical patent/JPS5125967A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP49098654A 1974-08-28 1974-08-28 Pending JPS5125967A (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49098654A JPS5125967A (enExample) 1974-08-28 1974-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49098654A JPS5125967A (enExample) 1974-08-28 1974-08-28

Publications (1)

Publication Number Publication Date
JPS5125967A true JPS5125967A (enExample) 1976-03-03

Family

ID=14225483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49098654A Pending JPS5125967A (enExample) 1974-08-28 1974-08-28

Country Status (1)

Country Link
JP (1) JPS5125967A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199639A (ja) * 1985-02-28 1986-09-04 Sony Corp 半導体の酸化方法
JPS6341028A (ja) * 1986-08-06 1988-02-22 Tokyo Electron Ltd 酸化膜形成方法
JPH04246161A (ja) * 1990-10-24 1992-09-02 Internatl Business Mach Corp <Ibm> 基板表面を酸化処理するための方法及び半導体の構造

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199639A (ja) * 1985-02-28 1986-09-04 Sony Corp 半導体の酸化方法
JPS6341028A (ja) * 1986-08-06 1988-02-22 Tokyo Electron Ltd 酸化膜形成方法
JPH04246161A (ja) * 1990-10-24 1992-09-02 Internatl Business Mach Corp <Ibm> 基板表面を酸化処理するための方法及び半導体の構造

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