JPS5125226B2 - - Google Patents

Info

Publication number
JPS5125226B2
JPS5125226B2 JP12343772A JP12343772A JPS5125226B2 JP S5125226 B2 JPS5125226 B2 JP S5125226B2 JP 12343772 A JP12343772 A JP 12343772A JP 12343772 A JP12343772 A JP 12343772A JP S5125226 B2 JPS5125226 B2 JP S5125226B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12343772A
Other languages
Japanese (ja)
Other versions
JPS4979934A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12343772A priority Critical patent/JPS5125226B2/ja
Publication of JPS4979934A publication Critical patent/JPS4979934A/ja
Publication of JPS5125226B2 publication Critical patent/JPS5125226B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP12343772A 1972-12-11 1972-12-11 Expired JPS5125226B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12343772A JPS5125226B2 (en:Method) 1972-12-11 1972-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12343772A JPS5125226B2 (en:Method) 1972-12-11 1972-12-11

Publications (2)

Publication Number Publication Date
JPS4979934A JPS4979934A (en:Method) 1974-08-01
JPS5125226B2 true JPS5125226B2 (en:Method) 1976-07-29

Family

ID=14860545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12343772A Expired JPS5125226B2 (en:Method) 1972-12-11 1972-12-11

Country Status (1)

Country Link
JP (1) JPS5125226B2 (en:Method)

Also Published As

Publication number Publication date
JPS4979934A (en:Method) 1974-08-01

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