JPS5125079A - KOTAINETSUSEIJUSHIMAKUNO SHORIHOHO - Google Patents

KOTAINETSUSEIJUSHIMAKUNO SHORIHOHO

Info

Publication number
JPS5125079A
JPS5125079A JP9703974A JP9703974A JPS5125079A JP S5125079 A JPS5125079 A JP S5125079A JP 9703974 A JP9703974 A JP 9703974A JP 9703974 A JP9703974 A JP 9703974A JP S5125079 A JPS5125079 A JP S5125079A
Authority
JP
Japan
Prior art keywords
kotainetsuseijushimakuno
shorihoho
kotainetsuseijushimakuno shorihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9703974A
Other languages
Japanese (ja)
Inventor
Hideki Isaka
Juichi Oosuzu
Ryosuke Namazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9703974A priority Critical patent/JPS5125079A/en
Publication of JPS5125079A publication Critical patent/JPS5125079A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9703974A 1974-08-26 1974-08-26 KOTAINETSUSEIJUSHIMAKUNO SHORIHOHO Pending JPS5125079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9703974A JPS5125079A (en) 1974-08-26 1974-08-26 KOTAINETSUSEIJUSHIMAKUNO SHORIHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9703974A JPS5125079A (en) 1974-08-26 1974-08-26 KOTAINETSUSEIJUSHIMAKUNO SHORIHOHO

Publications (1)

Publication Number Publication Date
JPS5125079A true JPS5125079A (en) 1976-03-01

Family

ID=14181403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9703974A Pending JPS5125079A (en) 1974-08-26 1974-08-26 KOTAINETSUSEIJUSHIMAKUNO SHORIHOHO

Country Status (1)

Country Link
JP (1) JPS5125079A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889825A (en) * 1981-11-24 1983-05-28 Shindengen Electric Mfg Co Ltd Manufacture of semiconductor device
JPS6122625A (en) * 1984-07-10 1986-01-31 Toshiba Corp Pattern forming method
JPS6159834A (en) * 1984-08-31 1986-03-27 Hitachi Ltd Detecting method of end point of etching
JPS6281029A (en) * 1985-10-04 1987-04-14 Mitsubishi Electric Corp Manufacture of semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889825A (en) * 1981-11-24 1983-05-28 Shindengen Electric Mfg Co Ltd Manufacture of semiconductor device
JPS6122625A (en) * 1984-07-10 1986-01-31 Toshiba Corp Pattern forming method
JPS6159834A (en) * 1984-08-31 1986-03-27 Hitachi Ltd Detecting method of end point of etching
JPS6281029A (en) * 1985-10-04 1987-04-14 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH0523493B2 (en) * 1985-10-04 1993-04-02 Mitsubishi Electric Corp

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