JPS5124987B2 - - Google Patents

Info

Publication number
JPS5124987B2
JPS5124987B2 JP7769072A JP7769072A JPS5124987B2 JP S5124987 B2 JPS5124987 B2 JP S5124987B2 JP 7769072 A JP7769072 A JP 7769072A JP 7769072 A JP7769072 A JP 7769072A JP S5124987 B2 JPS5124987 B2 JP S5124987B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7769072A
Other languages
Japanese (ja)
Other versions
JPS4935242A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7769072A priority Critical patent/JPS5124987B2/ja
Publication of JPS4935242A publication Critical patent/JPS4935242A/ja
Publication of JPS5124987B2 publication Critical patent/JPS5124987B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP7769072A 1972-08-04 1972-08-04 Expired JPS5124987B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7769072A JPS5124987B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-04 1972-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7769072A JPS5124987B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-04 1972-08-04

Publications (2)

Publication Number Publication Date
JPS4935242A JPS4935242A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-04-01
JPS5124987B2 true JPS5124987B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-28

Family

ID=13640874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7769072A Expired JPS5124987B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-04 1972-08-04

Country Status (1)

Country Link
JP (1) JPS5124987B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583387U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-12-02 1980-06-09

Also Published As

Publication number Publication date
JPS4935242A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-04-01

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