JPS512470B2 - - Google Patents

Info

Publication number
JPS512470B2
JPS512470B2 JP47060029A JP6002972A JPS512470B2 JP S512470 B2 JPS512470 B2 JP S512470B2 JP 47060029 A JP47060029 A JP 47060029A JP 6002972 A JP6002972 A JP 6002972A JP S512470 B2 JPS512470 B2 JP S512470B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47060029A
Other languages
Japanese (ja)
Other versions
JPS4918874A (sv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47060029A priority Critical patent/JPS512470B2/ja
Publication of JPS4918874A publication Critical patent/JPS4918874A/ja
Publication of JPS512470B2 publication Critical patent/JPS512470B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Nitrogen And Oxygen As The Only Ring Hetero Atoms (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
JP47060029A 1972-06-17 1972-06-17 Expired JPS512470B2 (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47060029A JPS512470B2 (sv) 1972-06-17 1972-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47060029A JPS512470B2 (sv) 1972-06-17 1972-06-17

Publications (2)

Publication Number Publication Date
JPS4918874A JPS4918874A (sv) 1974-02-19
JPS512470B2 true JPS512470B2 (sv) 1976-01-26

Family

ID=13130220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47060029A Expired JPS512470B2 (sv) 1972-06-17 1972-06-17

Country Status (1)

Country Link
JP (1) JPS512470B2 (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200036065A (ko) 2016-03-30 2020-04-06 케이힌 람테크 가부시키가이샤 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200036065A (ko) 2016-03-30 2020-04-06 케이힌 람테크 가부시키가이샤 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법

Also Published As

Publication number Publication date
JPS4918874A (sv) 1974-02-19

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