JPS512470B2 - - Google Patents
Info
- Publication number
- JPS512470B2 JPS512470B2 JP47060029A JP6002972A JPS512470B2 JP S512470 B2 JPS512470 B2 JP S512470B2 JP 47060029 A JP47060029 A JP 47060029A JP 6002972 A JP6002972 A JP 6002972A JP S512470 B2 JPS512470 B2 JP S512470B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Nitrogen And Oxygen As The Only Ring Hetero Atoms (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47060029A JPS512470B2 (en:Method) | 1972-06-17 | 1972-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47060029A JPS512470B2 (en:Method) | 1972-06-17 | 1972-06-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4918874A JPS4918874A (en:Method) | 1974-02-19 |
| JPS512470B2 true JPS512470B2 (en:Method) | 1976-01-26 |
Family
ID=13130220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47060029A Expired JPS512470B2 (en:Method) | 1972-06-17 | 1972-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS512470B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200036065A (ko) | 2016-03-30 | 2020-04-06 | 케이힌 람테크 가부시키가이샤 | 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법 |
-
1972
- 1972-06-17 JP JP47060029A patent/JPS512470B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200036065A (ko) | 2016-03-30 | 2020-04-06 | 케이힌 람테크 가부시키가이샤 | 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4918874A (en:Method) | 1974-02-19 |