JPS5123426B2 - - Google Patents

Info

Publication number
JPS5123426B2
JPS5123426B2 JP46103355A JP10335571A JPS5123426B2 JP S5123426 B2 JPS5123426 B2 JP S5123426B2 JP 46103355 A JP46103355 A JP 46103355A JP 10335571 A JP10335571 A JP 10335571A JP S5123426 B2 JPS5123426 B2 JP S5123426B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46103355A
Other languages
Japanese (ja)
Other versions
JPS4868169A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46103355A priority Critical patent/JPS5123426B2/ja
Publication of JPS4868169A publication Critical patent/JPS4868169A/ja
Publication of JPS5123426B2 publication Critical patent/JPS5123426B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP46103355A 1971-12-20 1971-12-20 Expired JPS5123426B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46103355A JPS5123426B2 (enExample) 1971-12-20 1971-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46103355A JPS5123426B2 (enExample) 1971-12-20 1971-12-20

Publications (2)

Publication Number Publication Date
JPS4868169A JPS4868169A (enExample) 1973-09-17
JPS5123426B2 true JPS5123426B2 (enExample) 1976-07-16

Family

ID=14351810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46103355A Expired JPS5123426B2 (enExample) 1971-12-20 1971-12-20

Country Status (1)

Country Link
JP (1) JPS5123426B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540540U (enExample) * 1978-09-05 1980-03-15

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750686B2 (ja) * 1986-01-07 1995-05-31 富士通株式会社 気相成長装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540540U (enExample) * 1978-09-05 1980-03-15

Also Published As

Publication number Publication date
JPS4868169A (enExample) 1973-09-17

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