JPS5122903B2 - - Google Patents

Info

Publication number
JPS5122903B2
JPS5122903B2 JP670972A JP670972A JPS5122903B2 JP S5122903 B2 JPS5122903 B2 JP S5122903B2 JP 670972 A JP670972 A JP 670972A JP 670972 A JP670972 A JP 670972A JP S5122903 B2 JPS5122903 B2 JP S5122903B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP670972A
Other languages
Japanese (ja)
Other versions
JPS4881742A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP670972A priority Critical patent/JPS5122903B2/ja
Publication of JPS4881742A publication Critical patent/JPS4881742A/ja
Publication of JPS5122903B2 publication Critical patent/JPS5122903B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
JP670972A 1972-01-18 1972-01-18 Expired JPS5122903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP670972A JPS5122903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-01-18 1972-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP670972A JPS5122903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-01-18 1972-01-18

Publications (2)

Publication Number Publication Date
JPS4881742A JPS4881742A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-01
JPS5122903B2 true JPS5122903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-13

Family

ID=11645809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP670972A Expired JPS5122903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-01-18 1972-01-18

Country Status (1)

Country Link
JP (1) JPS5122903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS4881742A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-01

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