JPS512189Y2 - - Google Patents
Info
- Publication number
- JPS512189Y2 JPS512189Y2 JP6958972U JP6958972U JPS512189Y2 JP S512189 Y2 JPS512189 Y2 JP S512189Y2 JP 6958972 U JP6958972 U JP 6958972U JP 6958972 U JP6958972 U JP 6958972U JP S512189 Y2 JPS512189 Y2 JP S512189Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6958972U JPS512189Y2 (en:Method) | 1972-06-13 | 1972-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6958972U JPS512189Y2 (en:Method) | 1972-06-13 | 1972-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4929122U JPS4929122U (en:Method) | 1974-03-13 |
| JPS512189Y2 true JPS512189Y2 (en:Method) | 1976-01-22 |
Family
ID=27966108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6958972U Expired JPS512189Y2 (en:Method) | 1972-06-13 | 1972-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS512189Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6998014B2 (en) | 2002-01-26 | 2006-02-14 | Applied Materials, Inc. | Apparatus and method for plasma assisted deposition |
-
1972
- 1972-06-13 JP JP6958972U patent/JPS512189Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6998014B2 (en) | 2002-01-26 | 2006-02-14 | Applied Materials, Inc. | Apparatus and method for plasma assisted deposition |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4929122U (en:Method) | 1974-03-13 |