JPS512189Y2 - - Google Patents

Info

Publication number
JPS512189Y2
JPS512189Y2 JP6958972U JP6958972U JPS512189Y2 JP S512189 Y2 JPS512189 Y2 JP S512189Y2 JP 6958972 U JP6958972 U JP 6958972U JP 6958972 U JP6958972 U JP 6958972U JP S512189 Y2 JPS512189 Y2 JP S512189Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6958972U
Other languages
Japanese (ja)
Other versions
JPS4929122U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6958972U priority Critical patent/JPS512189Y2/ja
Publication of JPS4929122U publication Critical patent/JPS4929122U/ja
Application granted granted Critical
Publication of JPS512189Y2 publication Critical patent/JPS512189Y2/ja
Expired legal-status Critical Current

Links

JP6958972U 1972-06-13 1972-06-13 Expired JPS512189Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6958972U JPS512189Y2 (enrdf_load_stackoverflow) 1972-06-13 1972-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6958972U JPS512189Y2 (enrdf_load_stackoverflow) 1972-06-13 1972-06-13

Publications (2)

Publication Number Publication Date
JPS4929122U JPS4929122U (enrdf_load_stackoverflow) 1974-03-13
JPS512189Y2 true JPS512189Y2 (enrdf_load_stackoverflow) 1976-01-22

Family

ID=27966108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6958972U Expired JPS512189Y2 (enrdf_load_stackoverflow) 1972-06-13 1972-06-13

Country Status (1)

Country Link
JP (1) JPS512189Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998014B2 (en) 2002-01-26 2006-02-14 Applied Materials, Inc. Apparatus and method for plasma assisted deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998014B2 (en) 2002-01-26 2006-02-14 Applied Materials, Inc. Apparatus and method for plasma assisted deposition

Also Published As

Publication number Publication date
JPS4929122U (enrdf_load_stackoverflow) 1974-03-13

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