JPS5121891A - - Google Patents

Info

Publication number
JPS5121891A
JPS5121891A JP49092270A JP9227074A JPS5121891A JP S5121891 A JPS5121891 A JP S5121891A JP 49092270 A JP49092270 A JP 49092270A JP 9227074 A JP9227074 A JP 9227074A JP S5121891 A JPS5121891 A JP S5121891A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49092270A
Other languages
Japanese (ja)
Inventor
Toshoshi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP49092270A priority Critical patent/JPS5121891A/ja
Publication of JPS5121891A publication Critical patent/JPS5121891A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP49092270A 1974-08-14 1974-08-14 Pending JPS5121891A (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49092270A JPS5121891A (enExample) 1974-08-14 1974-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49092270A JPS5121891A (enExample) 1974-08-14 1974-08-14

Publications (1)

Publication Number Publication Date
JPS5121891A true JPS5121891A (enExample) 1976-02-21

Family

ID=14049689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49092270A Pending JPS5121891A (enExample) 1974-08-14 1974-08-14

Country Status (1)

Country Link
JP (1) JPS5121891A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481065A (en) * 1977-12-12 1979-06-28 Jeol Ltd Sample analyzer of scanning electron microscope
JPS54109897A (en) * 1978-02-16 1979-08-28 Jeol Ltd Specimen analytical apparatus in scanning electron microscope or the like

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481065A (en) * 1977-12-12 1979-06-28 Jeol Ltd Sample analyzer of scanning electron microscope
JPS54109897A (en) * 1978-02-16 1979-08-28 Jeol Ltd Specimen analytical apparatus in scanning electron microscope or the like

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