JPS5121754B2 - - Google Patents

Info

Publication number
JPS5121754B2
JPS5121754B2 JP11448372A JP11448372A JPS5121754B2 JP S5121754 B2 JPS5121754 B2 JP S5121754B2 JP 11448372 A JP11448372 A JP 11448372A JP 11448372 A JP11448372 A JP 11448372A JP S5121754 B2 JPS5121754 B2 JP S5121754B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11448372A
Other languages
Japanese (ja)
Other versions
JPS4973085A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11448372A priority Critical patent/JPS5121754B2/ja
Publication of JPS4973085A publication Critical patent/JPS4973085A/ja
Publication of JPS5121754B2 publication Critical patent/JPS5121754B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP11448372A 1972-11-14 1972-11-14 Expired JPS5121754B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11448372A JPS5121754B2 (enExample) 1972-11-14 1972-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11448372A JPS5121754B2 (enExample) 1972-11-14 1972-11-14

Publications (2)

Publication Number Publication Date
JPS4973085A JPS4973085A (enExample) 1974-07-15
JPS5121754B2 true JPS5121754B2 (enExample) 1976-07-05

Family

ID=14638864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11448372A Expired JPS5121754B2 (enExample) 1972-11-14 1972-11-14

Country Status (1)

Country Link
JP (1) JPS5121754B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5265183A (en) * 1975-11-26 1977-05-30 Matsushita Electric Ind Co Ltd Production process of thin film of compounds

Also Published As

Publication number Publication date
JPS4973085A (enExample) 1974-07-15

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