JPS5121753B2 - - Google Patents

Info

Publication number
JPS5121753B2
JPS5121753B2 JP1360972A JP1360972A JPS5121753B2 JP S5121753 B2 JPS5121753 B2 JP S5121753B2 JP 1360972 A JP1360972 A JP 1360972A JP 1360972 A JP1360972 A JP 1360972A JP S5121753 B2 JPS5121753 B2 JP S5121753B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1360972A
Other languages
Japanese (ja)
Other versions
JPS4883788A (ja�@�@
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1360972A priority Critical patent/JPS5121753B2/ja
Publication of JPS4883788A publication Critical patent/JPS4883788A/ja
Publication of JPS5121753B2 publication Critical patent/JPS5121753B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP1360972A 1972-02-09 1972-02-09 Expired JPS5121753B2 (ja�@�@)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1360972A JPS5121753B2 (ja�@�@) 1972-02-09 1972-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1360972A JPS5121753B2 (ja�@�@) 1972-02-09 1972-02-09

Publications (2)

Publication Number Publication Date
JPS4883788A JPS4883788A (ja�@�@) 1973-11-08
JPS5121753B2 true JPS5121753B2 (ja�@�@) 1976-07-05

Family

ID=11837956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1360972A Expired JPS5121753B2 (ja�@�@) 1972-02-09 1972-02-09

Country Status (1)

Country Link
JP (1) JPS5121753B2 (ja�@�@)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5342059Y2 (ja�@�@) * 1972-11-01 1978-10-11
JPS5161781A (ja�@�@) * 1974-11-27 1976-05-28 Hitachi Ltd
JPS5214366A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Process for production of semiconductor device
JPS5425178A (en) * 1977-07-27 1979-02-24 Fujitsu Ltd Manufacture for semiconductor device
JPS5812671B2 (ja) * 1977-12-20 1983-03-09 富士通株式会社 多層構造の形成方法
WO1987002828A1 (en) * 1985-11-04 1987-05-07 Motorola, Inc. Glass intermetal dielectric

Also Published As

Publication number Publication date
JPS4883788A (ja�@�@) 1973-11-08

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