JPS512147B1 - - Google Patents

Info

Publication number
JPS512147B1
JPS512147B1 JP7307570A JP7307570A JPS512147B1 JP S512147 B1 JPS512147 B1 JP S512147B1 JP 7307570 A JP7307570 A JP 7307570A JP 7307570 A JP7307570 A JP 7307570A JP S512147 B1 JPS512147 B1 JP S512147B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7307570A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7307570A priority Critical patent/JPS512147B1/ja
Publication of JPS512147B1 publication Critical patent/JPS512147B1/ja
Pending legal-status Critical Current

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JP7307570A 1970-08-19 1970-08-19 Pending JPS512147B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7307570A JPS512147B1 (ko) 1970-08-19 1970-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7307570A JPS512147B1 (ko) 1970-08-19 1970-08-19

Publications (1)

Publication Number Publication Date
JPS512147B1 true JPS512147B1 (ko) 1976-01-23

Family

ID=13507831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7307570A Pending JPS512147B1 (ko) 1970-08-19 1970-08-19

Country Status (1)

Country Link
JP (1) JPS512147B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160322205A1 (en) * 2011-10-19 2016-11-03 Advanced Micro-Fabrication Equipment Inc, Shanghai Icp source design for plasma uniformity and efficiency enhancement
US11667340B2 (en) 2020-03-06 2023-06-06 Caterpillar Inc. Screw profile mud-packing preventing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160322205A1 (en) * 2011-10-19 2016-11-03 Advanced Micro-Fabrication Equipment Inc, Shanghai Icp source design for plasma uniformity and efficiency enhancement
US11667340B2 (en) 2020-03-06 2023-06-06 Caterpillar Inc. Screw profile mud-packing preventing

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