JPS5120266B2 - - Google Patents

Info

Publication number
JPS5120266B2
JPS5120266B2 JP3367372A JP3367372A JPS5120266B2 JP S5120266 B2 JPS5120266 B2 JP S5120266B2 JP 3367372 A JP3367372 A JP 3367372A JP 3367372 A JP3367372 A JP 3367372A JP S5120266 B2 JPS5120266 B2 JP S5120266B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3367372A
Other languages
Japanese (ja)
Other versions
JPS48102582A (US07541385-20090602-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3367372A priority Critical patent/JPS5120266B2/ja
Publication of JPS48102582A publication Critical patent/JPS48102582A/ja
Publication of JPS5120266B2 publication Critical patent/JPS5120266B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP3367372A 1972-04-03 1972-04-03 Expired JPS5120266B2 (US07541385-20090602-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3367372A JPS5120266B2 (US07541385-20090602-C00001.png) 1972-04-03 1972-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3367372A JPS5120266B2 (US07541385-20090602-C00001.png) 1972-04-03 1972-04-03

Publications (2)

Publication Number Publication Date
JPS48102582A JPS48102582A (US07541385-20090602-C00001.png) 1973-12-22
JPS5120266B2 true JPS5120266B2 (US07541385-20090602-C00001.png) 1976-06-23

Family

ID=12392959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3367372A Expired JPS5120266B2 (US07541385-20090602-C00001.png) 1972-04-03 1972-04-03

Country Status (1)

Country Link
JP (1) JPS5120266B2 (US07541385-20090602-C00001.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243385A (en) * 1975-10-01 1977-04-05 Hitachi Ltd Process for production of semiconductor integrated circuit
US4526631A (en) * 1984-06-25 1985-07-02 International Business Machines Corporation Method for forming a void free isolation pattern utilizing etch and refill techniques

Also Published As

Publication number Publication date
JPS48102582A (US07541385-20090602-C00001.png) 1973-12-22

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