JPS5120255B2 - - Google Patents

Info

Publication number
JPS5120255B2
JPS5120255B2 JP11541272A JP11541272A JPS5120255B2 JP S5120255 B2 JPS5120255 B2 JP S5120255B2 JP 11541272 A JP11541272 A JP 11541272A JP 11541272 A JP11541272 A JP 11541272A JP S5120255 B2 JPS5120255 B2 JP S5120255B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11541272A
Other languages
Japanese (ja)
Other versions
JPS4974484A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11541272A priority Critical patent/JPS5120255B2/ja
Publication of JPS4974484A publication Critical patent/JPS4974484A/ja
Publication of JPS5120255B2 publication Critical patent/JPS5120255B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Test And Diagnosis Of Digital Computers (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP11541272A 1972-11-17 1972-11-17 Expired JPS5120255B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11541272A JPS5120255B2 (en:Method) 1972-11-17 1972-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11541272A JPS5120255B2 (en:Method) 1972-11-17 1972-11-17

Publications (2)

Publication Number Publication Date
JPS4974484A JPS4974484A (en:Method) 1974-07-18
JPS5120255B2 true JPS5120255B2 (en:Method) 1976-06-23

Family

ID=14661915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11541272A Expired JPS5120255B2 (en:Method) 1972-11-17 1972-11-17

Country Status (1)

Country Link
JP (1) JPS5120255B2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150839U (ja) * 1983-02-07 1983-10-08 富士通株式会社 電子ビ−ムを用いた測定装置

Also Published As

Publication number Publication date
JPS4974484A (en:Method) 1974-07-18

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