JPS5120085A - Jochakuhakumakuno keiseihoho - Google Patents

Jochakuhakumakuno keiseihoho

Info

Publication number
JPS5120085A
JPS5120085A JP49092690A JP9269074A JPS5120085A JP S5120085 A JPS5120085 A JP S5120085A JP 49092690 A JP49092690 A JP 49092690A JP 9269074 A JP9269074 A JP 9269074A JP S5120085 A JPS5120085 A JP S5120085A
Authority
JP
Japan
Prior art keywords
keiseihoho
jochakuhakumakuno
jochakuhakumakuno keiseihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49092690A
Other languages
Japanese (ja)
Other versions
JPS5514868B2 (en
Inventor
Takao Chikamura
Shinji Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP49092690A priority Critical patent/JPS5120085A/en
Publication of JPS5120085A publication Critical patent/JPS5120085A/en
Publication of JPS5514868B2 publication Critical patent/JPS5514868B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP49092690A 1974-08-12 1974-08-12 Jochakuhakumakuno keiseihoho Granted JPS5120085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49092690A JPS5120085A (en) 1974-08-12 1974-08-12 Jochakuhakumakuno keiseihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49092690A JPS5120085A (en) 1974-08-12 1974-08-12 Jochakuhakumakuno keiseihoho

Publications (2)

Publication Number Publication Date
JPS5120085A true JPS5120085A (en) 1976-02-17
JPS5514868B2 JPS5514868B2 (en) 1980-04-19

Family

ID=14061475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49092690A Granted JPS5120085A (en) 1974-08-12 1974-08-12 Jochakuhakumakuno keiseihoho

Country Status (1)

Country Link
JP (1) JPS5120085A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130220219A1 (en) * 2012-02-24 2013-08-29 Industry-Academic Cooperation Foundation, Yeungnam University Apparatus for manufacturing photovoltaic cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130220219A1 (en) * 2012-02-24 2013-08-29 Industry-Academic Cooperation Foundation, Yeungnam University Apparatus for manufacturing photovoltaic cell

Also Published As

Publication number Publication date
JPS5514868B2 (en) 1980-04-19

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