JPS5119100Y2 - - Google Patents

Info

Publication number
JPS5119100Y2
JPS5119100Y2 JP1972075063U JP7506372U JPS5119100Y2 JP S5119100 Y2 JPS5119100 Y2 JP S5119100Y2 JP 1972075063 U JP1972075063 U JP 1972075063U JP 7506372 U JP7506372 U JP 7506372U JP S5119100 Y2 JPS5119100 Y2 JP S5119100Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1972075063U
Other languages
Japanese (ja)
Other versions
JPS4933155U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1972075063U priority Critical patent/JPS5119100Y2/ja
Publication of JPS4933155U publication Critical patent/JPS4933155U/ja
Application granted granted Critical
Publication of JPS5119100Y2 publication Critical patent/JPS5119100Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP1972075063U 1972-06-27 1972-06-27 Expired JPS5119100Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1972075063U JPS5119100Y2 (enrdf_load_html_response) 1972-06-27 1972-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1972075063U JPS5119100Y2 (enrdf_load_html_response) 1972-06-27 1972-06-27

Publications (2)

Publication Number Publication Date
JPS4933155U JPS4933155U (enrdf_load_html_response) 1974-03-23
JPS5119100Y2 true JPS5119100Y2 (enrdf_load_html_response) 1976-05-20

Family

ID=27976424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1972075063U Expired JPS5119100Y2 (enrdf_load_html_response) 1972-06-27 1972-06-27

Country Status (1)

Country Link
JP (1) JPS5119100Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100855U (ja) * 1982-12-24 1984-07-07 株式会社島津製作所 連続スパツタ装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY=1972US *

Also Published As

Publication number Publication date
JPS4933155U (enrdf_load_html_response) 1974-03-23

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