JPS5118779U - - Google Patents
Info
- Publication number
- JPS5118779U JPS5118779U JP8829374U JP8829374U JPS5118779U JP S5118779 U JPS5118779 U JP S5118779U JP 8829374 U JP8829374 U JP 8829374U JP 8829374 U JP8829374 U JP 8829374U JP S5118779 U JPS5118779 U JP S5118779U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974088293U JPS522697Y2 (uk) | 1974-07-26 | 1974-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974088293U JPS522697Y2 (uk) | 1974-07-26 | 1974-07-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5118779U true JPS5118779U (uk) | 1976-02-10 |
| JPS522697Y2 JPS522697Y2 (uk) | 1977-01-21 |
Family
ID=28273111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974088293U Expired JPS522697Y2 (uk) | 1974-07-26 | 1974-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS522697Y2 (uk) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58195233U (ja) * | 1982-06-21 | 1983-12-26 | 株式会社リコー | ミラ−調整装置 |
| JPS60143446U (ja) * | 1984-03-05 | 1985-09-24 | キヤノン株式会社 | 反射鏡を含む光学系 |
| JPS62109161U (uk) * | 1985-12-25 | 1987-07-11 | ||
| JPH01116663A (ja) * | 1987-10-30 | 1989-05-09 | Mita Ind Co Ltd | 光学系移動式露光装置におけるミラー |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4737184U (uk) * | 1971-05-15 | 1972-12-25 | ||
| JPS4985663U (uk) * | 1972-11-13 | 1974-07-24 |
-
1974
- 1974-07-26 JP JP1974088293U patent/JPS522697Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4737184U (uk) * | 1971-05-15 | 1972-12-25 | ||
| JPS4985663U (uk) * | 1972-11-13 | 1974-07-24 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58195233U (ja) * | 1982-06-21 | 1983-12-26 | 株式会社リコー | ミラ−調整装置 |
| JPS60143446U (ja) * | 1984-03-05 | 1985-09-24 | キヤノン株式会社 | 反射鏡を含む光学系 |
| JPH0511560Y2 (uk) * | 1984-03-05 | 1993-03-23 | ||
| JPS62109161U (uk) * | 1985-12-25 | 1987-07-11 | ||
| JPH01116663A (ja) * | 1987-10-30 | 1989-05-09 | Mita Ind Co Ltd | 光学系移動式露光装置におけるミラー |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS522697Y2 (uk) | 1977-01-21 |