JPS5118779U - - Google Patents

Info

Publication number
JPS5118779U
JPS5118779U JP8829374U JP8829374U JPS5118779U JP S5118779 U JPS5118779 U JP S5118779U JP 8829374 U JP8829374 U JP 8829374U JP 8829374 U JP8829374 U JP 8829374U JP S5118779 U JPS5118779 U JP S5118779U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8829374U
Other languages
Japanese (ja)
Other versions
JPS522697Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974088293U priority Critical patent/JPS522697Y2/ja
Publication of JPS5118779U publication Critical patent/JPS5118779U/ja
Application granted granted Critical
Publication of JPS522697Y2 publication Critical patent/JPS522697Y2/ja
Expired legal-status Critical Current

Links

JP1974088293U 1974-07-26 1974-07-26 Expired JPS522697Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974088293U JPS522697Y2 (enrdf_load_stackoverflow) 1974-07-26 1974-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974088293U JPS522697Y2 (enrdf_load_stackoverflow) 1974-07-26 1974-07-26

Publications (2)

Publication Number Publication Date
JPS5118779U true JPS5118779U (enrdf_load_stackoverflow) 1976-02-10
JPS522697Y2 JPS522697Y2 (enrdf_load_stackoverflow) 1977-01-21

Family

ID=28273111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974088293U Expired JPS522697Y2 (enrdf_load_stackoverflow) 1974-07-26 1974-07-26

Country Status (1)

Country Link
JP (1) JPS522697Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195233U (ja) * 1982-06-21 1983-12-26 株式会社リコー ミラ−調整装置
JPS60143446U (ja) * 1984-03-05 1985-09-24 キヤノン株式会社 反射鏡を含む光学系
JPS62109161U (enrdf_load_stackoverflow) * 1985-12-25 1987-07-11
JPH01116663A (ja) * 1987-10-30 1989-05-09 Mita Ind Co Ltd 光学系移動式露光装置におけるミラー

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4737184U (enrdf_load_stackoverflow) * 1971-05-15 1972-12-25
JPS4985663U (enrdf_load_stackoverflow) * 1972-11-13 1974-07-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4737184U (enrdf_load_stackoverflow) * 1971-05-15 1972-12-25
JPS4985663U (enrdf_load_stackoverflow) * 1972-11-13 1974-07-24

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195233U (ja) * 1982-06-21 1983-12-26 株式会社リコー ミラ−調整装置
JPS60143446U (ja) * 1984-03-05 1985-09-24 キヤノン株式会社 反射鏡を含む光学系
JPS62109161U (enrdf_load_stackoverflow) * 1985-12-25 1987-07-11
JPH01116663A (ja) * 1987-10-30 1989-05-09 Mita Ind Co Ltd 光学系移動式露光装置におけるミラー

Also Published As

Publication number Publication date
JPS522697Y2 (enrdf_load_stackoverflow) 1977-01-21

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