JPS5118188B2 - - Google Patents

Info

Publication number
JPS5118188B2
JPS5118188B2 JP6812071A JP6812071A JPS5118188B2 JP S5118188 B2 JPS5118188 B2 JP S5118188B2 JP 6812071 A JP6812071 A JP 6812071A JP 6812071 A JP6812071 A JP 6812071A JP S5118188 B2 JPS5118188 B2 JP S5118188B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6812071A
Other languages
Japanese (ja)
Other versions
JPS4834515A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6812071A priority Critical patent/JPS5118188B2/ja
Publication of JPS4834515A publication Critical patent/JPS4834515A/ja
Publication of JPS5118188B2 publication Critical patent/JPS5118188B2/ja
Expired legal-status Critical Current

Links

JP6812071A 1971-09-06 1971-09-06 Expired JPS5118188B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6812071A JPS5118188B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-09-06 1971-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6812071A JPS5118188B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-09-06 1971-09-06

Publications (2)

Publication Number Publication Date
JPS4834515A JPS4834515A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-05-19
JPS5118188B2 true JPS5118188B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-06-08

Family

ID=13364551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6812071A Expired JPS5118188B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-09-06 1971-09-06

Country Status (1)

Country Link
JP (1) JPS5118188B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410891Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-05-07 1979-05-18
US5593507A (en) * 1990-08-22 1997-01-14 Kabushiki Kaisha Toshiba Cleaning method and cleaning apparatus

Also Published As

Publication number Publication date
JPS4834515A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-05-19

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