JPS5117454U - - Google Patents

Info

Publication number
JPS5117454U
JPS5117454U JP8902074U JP8902074U JPS5117454U JP S5117454 U JPS5117454 U JP S5117454U JP 8902074 U JP8902074 U JP 8902074U JP 8902074 U JP8902074 U JP 8902074U JP S5117454 U JPS5117454 U JP S5117454U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8902074U
Other languages
Japanese (ja)
Other versions
JPS5444537Y2 (ja�@�@
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974089020U priority Critical patent/JPS5444537Y2/ja
Publication of JPS5117454U publication Critical patent/JPS5117454U/ja
Application granted granted Critical
Publication of JPS5444537Y2 publication Critical patent/JPS5444537Y2/ja
Expired legal-status Critical Current

Links

JP1974089020U 1974-07-26 1974-07-26 Expired JPS5444537Y2 (ja�@�@)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (ja�@�@) 1974-07-26 1974-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (ja�@�@) 1974-07-26 1974-07-26

Publications (2)

Publication Number Publication Date
JPS5117454U true JPS5117454U (ja�@�@) 1976-02-07
JPS5444537Y2 JPS5444537Y2 (ja�@�@) 1979-12-21

Family

ID=28274648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974089020U Expired JPS5444537Y2 (ja�@�@) 1974-07-26 1974-07-26

Country Status (1)

Country Link
JP (1) JPS5444537Y2 (ja�@�@)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351171U (ja�@�@) * 1976-10-05 1978-05-01
JPS5366158U (ja�@�@) * 1976-11-08 1978-06-03
JPS59161262U (ja) * 1983-04-14 1984-10-29 日本電子株式会社 絞り移動装置
JP2015210998A (ja) * 2014-04-30 2015-11-24 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置
JPWO2019186937A1 (ja) * 2018-03-29 2021-02-25 株式会社日立ハイテク 荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849376A (ja�@�@) * 1971-10-22 1973-07-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849376A (ja�@�@) * 1971-10-22 1973-07-12

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351171U (ja�@�@) * 1976-10-05 1978-05-01
JPS5366158U (ja�@�@) * 1976-11-08 1978-06-03
JPS59161262U (ja) * 1983-04-14 1984-10-29 日本電子株式会社 絞り移動装置
JP2015210998A (ja) * 2014-04-30 2015-11-24 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置
JPWO2019186937A1 (ja) * 2018-03-29 2021-02-25 株式会社日立ハイテク 荷電粒子線装置
US11335532B2 (en) 2018-03-29 2022-05-17 Hitachi High-Tech Corporation Charged particle beam device
US11817289B2 (en) 2018-03-29 2023-11-14 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPS5444537Y2 (ja�@�@) 1979-12-21

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